Mid-objective laser scanner

ABSTRACT

A Mid-Objective scanner system for correcting astigmatism, bow distortion and field curvature including a tilted lens or a toric lens for producing an opposite amount of astigmatism to correct astigmatism, a scanning mechanism and a concave cylindrical mirror for directing the scanned beam onto to a workpiece wherein the concave cylindrical mirror has a radius of curvature that corrects the field of curvature in the image plane of the workpiece and thereby enables the scanner system to correct astigmatism, bow distortion and field curvature.

CROSS-REFERENCE TO RELATED PATENT APPLICATION

This Patent Application is a Divisional Patent Application of U.S.patent application Ser. No. 08/250,890, filed on May 31, 1994, nowabandoned.

FIELD OF THE INVENTION

The present invention relates generally to a new method and apparatus tocorrect astigmatism, bow distortion and field curvature, and moreparticularly to an astigmatically corrected catadioptric laser scanneror a Mid-Objective Laser Scanner.

BACKGROUND OF THE INVENTION

Scanning systems using lasers are used in many applications. Laserscanners are part of a growing multi-billion dollar industry. Forexample, laser light could be scanned to drill holes in a semiconductorsubstrate to create micro-circuitry, or it could be used to scribealpha-numerics on a part or be used to read bar codes or used in laserprinters, just to name a few.

The laser scanning systems can be basically classified into three types:Objective Scanners, Pre-Objective Scanners, and Post-Objective Scanners.

Objective Scanners 19, as shown in FIGS. 1A and 1B, are the types ofscanners which use a simple lens 10, to focus a beam of light 25, suchas a laser beam 25, onto a work piece or a part 12. The focused laserbeam 25, is then scanned over the part 12, by either moving the lens 10,as shown in FIG. 1A, or moving the part 12, as shown in FIG. 1B. A majoradvantage of Objective Scanners is that the optics are less complex.While, major disadvantages of Objective Scanners are their slower scanspeeds and requirements of complex strategies to move the lens or thepart.

Pre-Objective Scanner 29, as shown in FIG. 2, are the types of scannersthat have a moving, mirrored surface 22, typically a galvanometer or arotating mirrored polygon, which reflects the laser beam 25, into a lens20. The lens 20, then focuses the laser beam 25, onto a part 12, atlocation 23. When the mirrored surface changes its angle, mirroredsurface 22', directs the laser beam 25, at a different angle into thelens 20. The lens 20, then focuses the beam 25, to another point 27, onthe part 12, as can be clearly seen in FIG. 2. Generally, the lenses 20,in a Pre-Objective scanning system 29, are complex and expensive. Majoradvantages of Pre-Objective Scanners 29, are their high scan speeds andtheir ability to have a flat field image. However, the majordisadvantages of Pre-Objective Scanners 29, are that the lenses are verycomplex, the lenses are not telecentric (a telecentric lens allows thecenter of the scanned beam of light to impinge the work surfaceorthogonally throughout the scan) unless the lens is very large, thesystem is complex, color correction is very difficult and all thesefeatures make the system very expensive.

Post-Objective Scanners 39, as shown in FIGS. 3A (side view) and 3B (topview), are the types of scanners that have a moving mirrored surface 22,usually a galvanometer or a rotating mirrored polygon, after a focusingobjective lens 30. The light or laser beam 25, after passing through alens will also be referred to as light or laser beam 125. The laser beam25, first passes through the lens 30, which starts to bring the laserbeam 125, to a focus. The laser beam 125, is interrupted and reflectedby the galvanometer or the mirrored surface 22, to focus on the surfaceof the part 12, at point 35. When the scanning mechanism changes itsangle it redirects the focus of the beam 125, as illustrated in FIG. 3A,to either spot 33 or 37, on an imaginary curve or arc 31. The beam 125,is perfectly focused on the arc 31, but it is out of focus at points orspots 34 and 38, on the flat surface 32, of the work piece or part 12.For the Post-Objective Scanner 39, in FIG. 3A, the laser beam 125, isfolded by the galvanometer 22, 90 degrees in the X-Y plane, so that thelaser beam focuses at point 35. When the galvanometer 22, scans the beam125, it rotates about an axis 135, which lies in the center of thefocusing beam 125, on the surface of the galvanometer 22, and in thedirection of the Z-axis. The galvanometer 22, moves so that itintersects the laser beam 125, at an angle which is not 90 degrees inthe X-Y plane. This causes the focused beam to scan along the arc 31.FIG. 3B, shows this Post-Objective Scanner 39, from a view that looksdown on the scanned arc 31. Although the scanned arc 31, is out of focusat the edge of the scan it travels a straight path in the X-Z plane.Generally, the lenses 30, in a Post-Objective scanning system 39, aresimple and inexpensive. Major advantages of Post-Objective scanners aretheir scan speeds, simplicity of the objective lens, colorcorrectability and their ability to be designed for more wavelengths.Major disadvantages include the fact that the image field is out offocus at the edges of the scanned field or not in focus throughout thescanned distance.

This invention is basically an improvement of the Post-Objective Scannertype and it is a fourth type of a laser scanning system which will nowbe referred to as Mid-Objective Scanner.

PURPOSES AND SUMMARY OF THE INVENTION

The invention is a novel method and an apparatus for a newastigmatically corrected catadioptric laser scanner.

Therefore, one purpose of this invention is to provide an apparatus anda method that will provide an astigmatically corrected catadioptriclaser scanner.

Another purpose of this invention is to provide a means for minimizingbow distortion, astigmatism, and field curvature resulting from aPost-Objective Scanner system.

Still another purpose of this invention is to have a scanner system thatuses very inexpensive lenses and mirrors.

Yet another purpose of this invention is to provide a beam that istelecentric, i.e., the center of the focusing beam is perpendicular tothe part at all points along the scan.

Still yet another purpose of the invention is to provide an opticalsystem which is inexpensively adaptable to different wavelengths oflight.

Yet another purpose of this invention is to provide an optical scanningsystem in which the length of the scanned line is directly proportionalto the angular change of the moving mirrored surface. This is the resultthat is sought for a so-called F-theta lens.

Therefore, in one aspect this invention comprises a method forcorrecting astigmatism, bow distortion and field curvature comprising:

(a) at least one lens tilted at an angle alpha for focusing at least oneincoming light beam onto at least one workpiece,

(b) at least one scanning mechanism for interrupting and scanning saidat least one incoming light beam,

(c) said at least one scanning mechanism further directing said at leastone incoming light beam onto at least a portion of the reflectivesurface of a concave cylindrical mirror, and

(d) wherein said concave cylindrical mirror directing said at least oneincoming light beam onto said workpiece, such that said at least oneincoming light beam is focused at said workpiece.

In another aspect this invention comprises an apparatus for correctingastigmatism, bow distortion and field curvature comprising:

(a) at least one means for tilting at least one lens alpha degrees tofocus at least one incoming light beam onto at least one workpiece,

(b) a scanning mechanism located between said at least one tilted lensand said at least one workpiece, wherein said scanning mechanism has atleast one means for directing said at least one incoming light beam ontoat least a portion of the reflective surface of a concave cylindricalmirror, and

(c) a means in said concave cylindrical mirror for directing said atleast one incoming light beam onto a workpiece, such that said at leastone incoming light beam is focused at said workpiece.

In yet another aspect this invention comprises an apparatus forcorrecting astigmatism, bow distortion and field curvature comprising:

(a) at least one toric lens to focus at least one incoming light beamonto at least one workpiece,

(b) a scanning mechanism located between said at least one toric lensand said at least one workpiece, wherein said scanning mechanism has atleast one means for directing said at least one incoming light beam ontoat least a portion of the reflective surface of a concave cylindricalmirror, and

(c) a means in said concave cylindrical mirror for directing said atleast one incoming light beam onto a workpiece, such that said at leastone incoming light beam is focused at said workpiece.

In still yet another aspect this invention comprises a method forcorrecting astigmatism, bow distortion and field curvature comprising:

(a) at least one toric lens for focusing at least one incoming lightbeam onto at least one workpiece,

(b) at least one scanning mechanism for interrupting and scanning saidat least one incoming light beam,

(c) said at least one scanning mechanism further directing said at leastone incoming light beam onto at least a portion of the reflectivesurface of a concave cylindrical mirror, and

(d) wherein said concave cylindrical mirror directing said at least oneincoming light beam onto said workpiece, such that said at least oneincoming light beam is focused at said workpiece.

BRIEF DESCRIPTION OF THE DRAWINGS

The features of the invention believed to be novel and the elementscharacteristic of the invention are set forth with particularity in theappended claims. The figures are for illustration purposes only and arenot drawn to scale. The invention itself, however, both as toorganization and method of operation, may best be understood byreference to the detailed description which follows taken in conjunctionwith the accompanying drawings in which:

FIGS. 1A and 1B, illustrate two typical prior art Objective Scanners.

FIG. 2, illustrates a typical prior art Pre-Objective Scanner.

FIGS. 3A and 3B, illustrate the side view and top view respectively of atypical prior art Post-Objective Scanner.

FIG. 4, illustrates a method to correct the field curvature of the priorart Post-Objective Scanner as shown in FIGS. 3A and 3B.

FIG. 5A, illustrates field curvature and bow distortion induced bytypical prior art Post-Objective Scanners.

FIG. 5B, illustrates the top view of the Post-Objective scanning systemof FIG. 5A, in the X-Z plane.

FIG. 6, illustrates astigmatism induced by a lens.

FIG. 7, illustrates a preferred embodiment of the invention.

FIG. 8, illustrates another embodiment of the invention using a toriclens.

DETAILED DESCRIPTION OF THE INVENTION

This invention relates more particularly to an astigmatically correctedcatadioptric laser scanner or a Mid-Objective Laser Scanner system. Acatadioptric system is a system that uses both reflection and refractionto achieve its focal power. While the relative powers of the lenses andmirrors vary from system to system, the use of the reflective surfacesto achieve most of the power, in combination with refractive surfaces oflittle or zero power, produces an image that has improved aberrationalcharacteristics.

A lens as used herein means a single lens element or a plurality of lenselements.

This invention may also utilize a lens that is achromatic so thatmultiple colors of light or multiple wavelengths of light could be usedin the inventive Mid-Objective scanning system.

Referring back to FIGS. 3A and 3B, when a Post-Objective Scanner 39,scans the focused laser spot 35, on an imaginary line or curve 31, itswings the focus point or spot 35, in an arc or curve 31, which has aradius of curvature, which radius of curvature is exactly the samedistance from the center of the galvanometer 22, to the focus point 35,as shown in FIGS. 3A and 3B. This creates a deviation from a flat imageplane which is called field curvature 36. Field curvature 36, is thedistance between the arc 31, and the flat surface 32, of the part 12. Ascan be clearly seen in FIGS. 3A and 3B, the arc 31, is completelyfocused at point 35, however when the beam 125, is scanned in eitherdirection to spot 33 or 37, beam 125, goes out of focus on the flatsurface 32, of the part 12, as can be seen at point 34 and 38,respectively, on the part 12. A perfect scan would be if the focusedspot 35, followed a straight scan line or the flat surface 32, on thepart 12, to properly scan the part 12.

This field curvature 36, can be corrected using a Post-Objective Scanner49, as shown in FIG. 4, by reflecting the scanned beam 125, off of acurved mirror 42, having a correct radius of curvature 48, as shown inFIG. 4. This creates a straight scan line or a flat image field 41, andas one can clearly see that focused points 43, 45 and 47, all arefocusing on the imaginary image plane or field 41. However, this flatimage plane 41, is not physically accessible because the part 12, mustlie between the laser source and the curved mirror 42, and for mostapplications the laser beam 125, cannot generally pass through the part12.

As shown in FIGS. 5A (side view) and 5B (top view), when aPost-Objective Scanner 59, having a moving mirrored surface 50, 50',redirects the laser beam 125, at an angle of 90 degrees in the X-Yplane, but then scans the focused spot by rotating the galvanometer 50,about an axis 54. The path that the scanned spot takes 51, is not onlycurved out of focus from the flat part or work-piece 12, but is alsocurved away from the straight line 52. This deviation of the actual scanpath from a straight line is called bow distortion. This bow distortioncan be clearly seen in FIG. 5B, which is a view of the scanning system59, as seen by looking directly at the work surface 12, through thegalvanometer 50. The locus of focused spots not only lies on a curvedsurface in the X-Y plane (i.e., producing field curvature) the scannedline is curved in the X-Z plane (i.e., producing bow distortion). Itshould be noted that this bow distortion is not created when thegalvanometer scans the focused spot or point in the X-Y plane as shownin FIGS. 3A and 3B.

However, one way to correct this bow distortion has been discussed in apaper by Victor J. Doherty of Eidolon Corporation, entitled "CorrectionScheme for a Post-Objective Optical Scanner", Society of Photo-OpticalInstrumentation Engineers, International Lens Design Conference, Vol.554, Pages 247-251 (1985). In his scheme he discusses the use of aspherical mirror similar to that of 42, shown in FIG. 4, but he tilts itat a 45 degree angle to make the image plane accessible. However, thiscorrection adds an aberration to the image called astigmatism.

A typical example of astigmatism induced by a lens is illustrated inFIG. 6, where the lens aberration results in the tangential and sagittalimage planes being separated axially, or where one axis of the focusinglight beam comes to focus before the other axis. As shown in FIG. 6, inan optical system 60, having an object point 61, and optical axis 65,tangential fan of rays 62, come in focus at the tangential image orfocal line 64, while the sagittal fan of rays 66, come in focus at thesagittal image or focal line 68.

In the Eidolon correction scheme the correction of the two aberrationswas attempted by making the mirror toroidal, similar to that of mirror42, as shown in FIG. 4, instead of spherical, i.e., the folding mirrorhas different spherical curvatures in each axis. It has been seen thatthe toroidal mirror does not correct all of the bow distortion in thesystem, and it also does not correct all of the astigmatism. The Eidoloncorrection scheme basically offers a compromise between the correctionof the two aberrations, i.e., one due to the bow distortion and theother due to astigmatism.

However, the inventors of this invention have discovered a new methodand apparatus to correct both the astigmatism and the bow distortion andalso the field curvature.

The preferred embodiment of the invention is a Mid-Objective Scannersystem 79, as shown in FIG. 7, which uses a simple refractive objective70, which is at an angle α, to begin to bring an incident laser beam 25,to focus. The beam 125, is interrupted by a scanning mechanism 50, suchas a galvanometer or a rotating mirrored polygon, and is reflected 90degrees by it in the X-Y plane. The galvanometer 50, scans the laserbeam 125, by rotating about an axis 74.

Before the laser 125, comes to focus, the center of the laser beam inthe center of the scan is again folded 90 degrees by a concavecylindrical mirror 77, having a radius of curvature 78, in the sameplane that the galvanometer 50, folded the beam before, but it is foldedin such a way as to redirect the laser 125, in the same propagationdirection it had before it was folded by the galvanometer 50. Thecurvature of the concave cylindrical mirror 77, is typically tilted at a45 degree angle in the X-Z plane, and is of a radius of curvature 78,that corrects the field curvature in the image plane 75.

By folding the beam 125, again in this way, bow distortion is againadded to the system, but it is opposite to that of the bow distortionadded by the galvanometer 50. Thus, the bow distortion cancels itselfout and the image is free of it.

After the bow distortion has been corrected the only degradingaberration left in the system is the astigmatism. This astigmatism istaken out of the image by adding the opposite amount of astigmatism inthe first, simple, refractive objective 70. This is accomplished bytilting the lens 70, at an angle α, in the plane that the laser 125, isbeing folded (the X-Y plane) as shown more clearly in FIG. 7.

The amount or angle of the tilt α, is dependent upon several factors,such as, (a) the resolution of the system, measured by the numericalaperture, (b) the working distance from the reflective surface of theconcave cylindrical mirror 77, to the work piece 12, (c) the distancebetween the moving mirrored surface 50, and the reflective surface ofthe concave cylindrical mirror 77, (d) the distance between the lens 70,and the moving mirrored surface 50, and (e) the focal length of the lensor the refractive objective 70, that is used, to name a few.

Similarly, the radius of curvature 78, for the concave cylindricalmirror 77, depends on factors, such as, (a) the distance between thelens 70, and the moving mirrored surface 50, (b) the distance betweenthe moving mirrored surface 50, and the reflective surface of theconcave cylindrical mirror 77, and (c) the focal length of the lens 70,to name a few.

If the lens 70, is tilted about its nodal point, (a nodal point is animaginary point found for every lens), the focused image position willnot move as the lens 70, is tilted. This will allow the continuousobservation of the focused spot as the image quality is improved, muchlike watching a defocused image come in to focus. As the objective 70,is tilted, the laser beam 25, may be observed to identify the point atwhich the astigmatism is minimized.

FIG. 8, illustrates another embodiment of an inventive Mid-ObjectiveScanner 89, using a toric lens 80. A toric lens is a lens which has asurface having a maximum power in one meridian and a minimum power in aperpendicular meridian. A toric lens is typically used to correctastigmatism. The Mid-Objective Scanner 89, would be a little moreexpensive to build than the Mid-Objective Scanner 79, because of thetoric lens 80, however for some applications it might be desirable tohave such a lens. Toric surface 81, of the toric lens 80, should producethe astigmatism that needs to be added or compensated, in order toobtain a flat image or line 75, at the surface of the work-piece 12.

The at least one incoming beam of light 25 or 125, could be a laser beamor it could be a collimated beam of light energy.

This apparatus and process called the Mid-Objective Scanner enables theuse of a flat-field Post-Objective Scanner that is free from astigmatismand bow distortion. Additionally, the resulting scanned laser beam is amajor improvement over currently available technology.

This invention removes bow distortion, astigmatism, and field curvature.It uses very inexpensive lenses and mirrors. It also provides atelecentric beam, i.e., a beam that when it is scanned the center of thebeam is perpendicular to the part at all points along the scan. Thisinvention also produces a scanned line in which the length of thescanned line is directly proportional to the scan angle of the movingsurface 50. This is a condition that is strived for in a scanning systemwhich is known as the F-theta condition.

One appropriate use or application for the Mid-Objective Scanner of thisinvention is to replace the optical scanning system in the MLDSCorrection Scheme, which is a correction system invented at IBMCorporation and a subject of U.S. Pat. No. 5,168,454 (LaPlante, et al.),the disclosure of which is incorporated herein by reference. MLDS is aTrade Mark of IBM Corporation, Armonk, N.Y., U.S.A. Because theMid-Objective Scanner of this invention provides a telecentric lenssystem the holes that are drilled with the maskless laser drillingsystem (MLDS) of the above-mentioned U.S. Pat. No. 5,168,454, will allbe uniform throughout the scan, i.e., the drilled holes will not have anangle or tilted edge walls as the distance from the center of the scanchanges.

While the present invention has been particularly described, inconjunction with a specific preferred embodiment, it is evident thatmany alternatives, modifications and variations will be apparent tothose skilled in the art in light of the foregoing description. It istherefore contemplated that the appended claims will embrace any suchalternatives, modifications and variations as falling within the truescope and spirit of the present invention.

What is claimed is:
 1. An apparatus comprising a Mid-Objective scannersystem for correcting astigmatism, bow distortion and field curvaturecomprising:(a) at least one means for tilting at least one lens at anangle alpha to focus at least one incoming light beam onto at least onescanning mechanism, wherein said lens is tilted at said angle alpha toproduce an opposite amount of astigmatism to thereby correctastigmatism, (b) said scanning mechanism located between said at leastone tilted lens and at least one workpiece, wherein said scanningmechanism has at least one means for directing said at least oneincoming light beam onto at least a portion of the reflective surface ofa concave cylindrical mirror, and (c) a means in said concavecylindrical mirror for directing said at least one incoming light beamonto a workpiece, such that said at least one incoming light beam isfocused at said workpiece, wherein said concave cylindrical mirror has aradius of curvature which corrects the field curvature in the imageplane of said workpiece, and thereby correcting astigmatism, bowdistortion and field curvature using a Mid-Objective scanner system. 2.The apparatus of claim 1, wherein said at least one light beam is alaser beam.
 3. The apparatus of claim 1, wherein said at least one lightbeam is a collimated beam of light energy.
 4. The apparatus of claim 1,wherein said scanning mechanism is a galvanometer.
 5. The apparatus ofclaim 1, wherein said scanning mechanism is a rotating mirrored polygon.6. The apparatus of claim 1, wherein said lens is an achromatic lens. 7.The apparatus of claim 1, wherein said lens is tilted about its nodalpoint.
 8. The apparatus of claim 1, wherein the radius of curvature forsaid concave cylindrical mirror is selected depending upon, (a) thedistance between said lens and the scanning surface of said scanningmechanism, (b) the distance between the scanning surface of saidscanning mechanism and said reflective surface of said concavecylindrical mirror, and (c) the focal length of said lens.
 9. Theapparatus of claim 1, wherein said angle alpha of said at least onetilted lens is dependent upon, (a) the resolution of the system,measured by the numerical aperture, (b) the working distance from saidreflective surface of said concave cylindrical mirror to said workpiece,(c) the distance between the scanning surface of said scanning mechanismand said reflective surface of said concave cylindrical mirror, (d) thedistance between said lens and the scanning surface of said scanningmechanism, and (e) the focal length of said lens.
 10. The apparatus ofclaim 1, wherein said scanning mechanism reflects said incoming lightbeam at a 90 degree angle.
 11. The apparatus of claim 1, wherein saidconcave cylindrical mirror reflects said incoming light beam at a 90degree angle.
 12. An apparatus comprising a Mid-Objective scanner systemfor correcting astigmatism, bow distortion and field curvaturecomprising:(a) at least one toric lens to focus at least one incominglight beam onto at least one scanning mechanism, wherein said lensproduces an opposite amount of astigmatism to thereby correctastigmatism, (b) said scanning mechanism located between said at leastone toric lens and at least one workpiece, wherein said scanningmechanism has at least one means for directing said at least oneincoming light beam onto at least a portion of the reflective surface ofa concave cylindrical mirror, and (c) a means in said concavecylindrical mirror for directing said at least one incoming light beamonto said workpiece, such that said at least one incoming light beam isfocused at said workpiece, wherein said concave cylindrical mirror has aradius of curvature which corrects the field curvature in the imageplane of said workpiece, and thereby correcting astigmatism, bowdistortion and field curvature using a Mid-Objective scanner system. 13.The apparatus of claim 12, wherein said at least one light beam is alaser beam.
 14. The apparatus of claim 12, wherein said at least onelight beam is a collimated beam of light energy.
 15. The apparatus ofclaim 12, wherein said scanning mechanism is a galvanometer.
 16. Theapparatus of claim 12, wherein said scanning mechanism is a rotatingmirrored polygon.
 17. The apparatus of claim 12, wherein the radius ofcurvature for said concave cylindrical mirror is selected dependingupon, (a) the distance between said lens and the scanning surface ofsaid scanning mechanism, (b) the distance between the scanning surfaceof said scanning mechanism and said reflective surface of said concavecylindrical mirror, and (c) the focal length of said lens.
 18. Theapparatus of claim 12, wherein said scanning mechanism reflects saidincoming light beam at a 90 degree angle.
 19. The apparatus of claim 12,wherein said concave cylindrical mirror reflects said incoming lightbeam at a 90 degree angle.